·Managed and designed the integration of liquid and gas delivery to CVD-CU and PVD chamber to PVD platform. Facilitated cross functional groups, SEMI S2, safety, and abatement for the system. Redesigned high vacuum system to improve throughput.
Senior Mechanical Engineer
·Designed and integrated VME based controller for new CVD product.
·Add value to existing product by reducing cost and improving manufacturability (DFM).
·Resolve integration issues of HDP-CVD chamber to CENTURA platform, Gas delivery and Microwave plasma remote clean.
·Resolved thermal issues related to cooper deposition abatement for CU deposition chamber.